EAP設(shè)備自動(dòng)化（Equipment Automation Programming）
EAP（Equipment Automation Programming）實(shí)現(xiàn)了對生產(chǎn)線上機(jī)臺的實(shí)時(shí)監(jiān)控，是工廠自動(dòng)化不可缺少的控制系統(tǒng)。EAP系統(tǒng)與FAB中的機(jī)臺緊密相關(guān)，系統(tǒng)的設(shè)計(jì)與開發(fā)必須與生產(chǎn)線的機(jī)臺實(shí)際生產(chǎn)流程相一致，才能達(dá)到控制機(jī)臺生產(chǎn)的目的。
EAP是MES與設(shè)備的橋梁，EAP通過SECS國際標(biāo)準(zhǔn)協(xié)議與機(jī)臺進(jìn)行數(shù)據(jù)傳輸。SECS是半導(dǎo)體設(shè)備（半導(dǎo)體行業(yè)稱設(shè)備為機(jī)臺）必須遵循的一種國際通信協(xié)議。EAP就是通過SECS與設(shè)備通信、傳輸數(shù)據(jù)、發(fā)送指令控制設(shè)備按照預(yù)先定義的流程進(jìn)行生產(chǎn)加工，達(dá)到對設(shè)備遠(yuǎn)程控制和狀態(tài)監(jiān)控，實(shí)現(xiàn)設(shè)備運(yùn)行的自動(dòng)化。
EAP是CIMS系統(tǒng)最低層的子系統(tǒng)，也是FAB中最為關(guān)鍵的系統(tǒng)之一。所有的生產(chǎn)過程，生產(chǎn)數(shù)據(jù)和機(jī)臺狀態(tài)數(shù)據(jù)都是通過EAP系統(tǒng)收集，然后傳送給MES、AS等服務(wù)器對應(yīng)的數(shù)據(jù)庫，MES通過這些數(shù)據(jù)對產(chǎn)品和設(shè)備事件進(jìn)行跟蹤和監(jiān)控。如果沒有EAP系統(tǒng)FAB中的CIMS就沒有實(shí)際的意義，生產(chǎn)的自動(dòng)化也就無從談起。EAP系統(tǒng)的開發(fā)基于SECS國際標(biāo)準(zhǔn)協(xié)議。
EAP在CIMS中的地位
EAP是CIMS系統(tǒng)與設(shè)備系統(tǒng)聯(lián)系最緊密的子系統(tǒng)，也是CIMS中底層的系統(tǒng)。FAB生產(chǎn)線實(shí)現(xiàn)自動(dòng)化過程中，EAP是不可缺少的子系統(tǒng)。

EAP系統(tǒng)功能
設(shè)備初始化控制。當(dāng)設(shè)備需要重啟并建立了通訊連接后，需要進(jìn)行一些初始化工作，如定義事件、警報(bào)等。
物料狀態(tài)跟蹤。實(shí)時(shí)對正在設(shè)備上加工的物料狀態(tài)進(jìn)行跟蹤監(jiān)控，如晶圓目前正在哪個(gè)加工倉(Chamber)，進(jìn)行哪一個(gè)步驟的加工等。
警報(bào)管理。當(dāng)機(jī)臺出現(xiàn)故障時(shí)，根據(jù)機(jī)臺的警報(bào)及時(shí)傳達(dá)給相應(yīng)的設(shè)備工程師，以便及時(shí)處理。
機(jī)臺狀態(tài)監(jiān)控。實(shí)時(shí)監(jiān)控機(jī)臺的狀態(tài)，是運(yùn)行、空閑還是維護(hù)等，以便合理地利用機(jī)臺，提高設(shè)備利用率。

配方管理。機(jī)臺在跑不同批次的貨時(shí)，采用不同的配方，設(shè)備自動(dòng)化系統(tǒng)通過對每一批貨的判斷，指示機(jī)臺采用相應(yīng)的配方進(jìn)行加工。
數(shù)據(jù)采集。在半導(dǎo)體生產(chǎn)過程中，將會(huì)產(chǎn)生大量諸如溫度、壓力等參數(shù)，這些參數(shù)對于晶圓能夠保持在正常合理的參數(shù)下進(jìn)行加工，有著非常重要的參考價(jià)值。在生產(chǎn)運(yùn)行過程中，當(dāng)工藝設(shè)備生產(chǎn)到一定的批數(shù)以后，有些參數(shù)會(huì)漂移，通過缺陷檢測分類系統(tǒng)能夠及時(shí)探測到偏差，并通過 Run-to-Run 的實(shí)時(shí)方式做調(diào)整，不斷搜集機(jī)臺當(dāng)前運(yùn)行的參數(shù)，當(dāng)參數(shù)偏離原值、并可能超出設(shè)定的區(qū)間范圍時(shí)，可以通過實(shí)時(shí)調(diào)整的方式直接修改參數(shù)，并不斷的反饋、調(diào)整以確保生產(chǎn)的正常運(yùn)營。
機(jī)臺生產(chǎn)模式控制。控制機(jī)臺的生產(chǎn)模式，是自動(dòng)生產(chǎn)還是手動(dòng)操作。因?yàn)橛行┣闆r，機(jī)臺需要手動(dòng)操作，比如在上線測試的時(shí)候。

EAP 
EAP (equipment automation programming) realizes the real-time monitoring of machines on the production line. It is an indispensable control system for factory automation. EAP system is closely related to the machine in fab. The design and development of the system must be consistent with the actual production process of the machine in the production line in order to achieve the purpose of controlling the machine production.
EAP is the bridge between MES and equipment. EAP transmits data with the machine through secs international standard protocol. Secs is an international communication protocol that must be followed by semiconductor equipment (equipment is called machine in semiconductor industry). EAP is to communicate with the equipment, transmit data and send instructions through secs to control the equipment to carry out production and processing according to the pre-defined process, so as to achieve remote control and status monitoring of the equipment and realize the automation of equipment operation.
EAP is the lowest subsystem of CIMS system and one of the most critical systems in fab. All production process, production data and machine status data are collected through EAP system and then transmitted to the database corresponding to MES, as and other servers. MES tracks and monitors product and equipment events through these data. If there is no EAP system, CIMS in fab has no practical significance, and production automation is impossible. The development of EAP system is based on secs international standard protocol.
The position of EAP in CIMS
EAP is the most closely related subsystem between CIMS system and equipment system, and it is also the bottom system in CIMS. EAP is an indispensable subsystem in the automation process of Fab production line.
EAP system functions
Device initialization control. When the device needs to be restarted and a communication connection is established, some initialization work needs to be carried out, such as defining events, alarms, etc.
Material status tracking. Track and monitor the status of materials being processed on the equipment in real time, such as which chamber the wafer is currently in and which step is being processed.
Alert management. When the machine fails, it shall be timely transmitted to the corresponding equipment engineer according to the alarm of the machine for timely treatment.
Machine condition monitoring. Monitor the status of the machine in real time, whether it is running, idle or maintenance, so as to make rational use of the machine and improve the utilization rate of the equipment.
Recipe management. When running different batches of goods, the machine adopts different formulas. The equipment automation system instructs the machine to adopt the corresponding formula for processing through the judgment of each batch of goods.
Data collection. In the process of semiconductor production, a large number of parameters such as temperature and pressure will be produced. These parameters have very important reference value for the wafer to be processed under normal and reasonable parameters. In the process of production and operation, some parameters will drift when the process equipment is produced to a certain number of batches. The deviation can be detected in time through the defect detection and classification system, and adjusted through the run-to-run real-time mode to continuously collect the current operating parameters of the machine. When the parameters deviate from the original value and may exceed the set range, The parameters can be directly modified through real-time adjustment, and continuous feedback and adjustment can be made to ensure the normal operation of production.
Machine production mode control. Control the production mode of the machine, whether it is automatic production or manual operation. Because in some cases, the machine needs to be operated manually, such as during on-line test.