承載環(huán)尺寸:8寸和12寸

Bearing ring size: 8 inches and 12 inches

三個上料工位；

Three loading work stations;

控制系統(tǒng)：工控機系統(tǒng)；

Control system: industrial control machine system;

ESD Fan；

FFU過濾器；

FFU filter;

UPS電源；

UPS power supply;

SECS/GEM 聯(lián)機

The SECS/GEM is brought online

每小時產(chǎn)能：≥100 片晶圓；

hourly capacity: ≥ 100 wafers;

機器指示：三色燈塔顯示機臺工作狀態(tài)

Machine indication: three-color lighthouse display console operating status