晶圓尺寸 8&12”；厚度 200~1600um；

Crystal Size 8 & 12 "; thickness 200~1600um;

晶圓種類(lèi) 硅，坤化鎵或其他的單邊,V 型缺口晶圓；

Crystal types of silicon, gallium Kund or other one-sided, V-type notch wafer;

8"/12" 晶圓分選傳送功能，支持12" FOUP,  8" Open Cassette；

8 "/ 12" wafer transfer transfer supporting 12 "FOUP,8" Open Cassette;

兩套帶罩子8"/12" 晶圓盒Load Port Station;

Two sets with cover 8 "/ 12" wafer cartridge Load Port Station;

一套傳片Robot和帶Y軸移動(dòng)模塊；

A set of transmission Robot and Y-axis moving module;

一套自動(dòng)對(duì)位Aligner；

A set of automatic alignment Aligner; 

工控機(jī)系統(tǒng)；

Industrial control machine system;

OCR系統(tǒng)；

OCR system;

ESD Fan；

FFU過(guò)濾器；

FFU filter;

UPS電源；

UPS power supply;

SECS/GEM 聯(lián)機(jī)；

The SECS/GEM is brought online;

每小時(shí)產(chǎn)能：≥150 片晶圓；

hourly capacity: ≥ 150 wafers;

更換產(chǎn)品時(shí)間：≤ 5 分鐘；

Replacement of product time: ≤ 5 minutes;

機(jī)器指示：三色燈塔顯示機(jī)臺(tái)工作狀態(tài)；

Machine indication: three-color lighthouse display console operating status;